News: Suppliers
14 December 2021
k-Space launches kSA ACE metrology instrument
k-Space Associates Inc of Dexter, MI, USA – which produces thin-film metrology instrumentation and software for research and manufacturing of microelectronic, optoelectronic and photovoltaic devices – has launched its newest thin-film metrology product, kSA ACE (Atomic Control for Epitaxy).
k-Space engineers designed the tool with input from scientists in the research and production communities to provide an accurate and high-resolution in-situ instrument that monitors the flux and growth rate of atomic species, using the principle of atomic absorption spectroscopy. The kSA ACE uses conventional hollow cathode lamps (HCLs) to generate the atomic emission for the elements of interest. The instrument utilizes two high-sensitivity, UV-optimized solid-state spectrometers — one to monitor the absorption and the other to monitor signal drift from the HCLs.
k-Space says that the kSA ACE can measure each material of interest independently and with high accuracy, providing precise control over material-specific flux in multi-source processes. The tool is suitable for applications including the fabrication of III-V and II-V compounds, semiconductor devices, thin-film sensors, solar cells, optical coatings, x-ray optics, and flat-panel displays.
“When we learned that there was a demand for a highly sensitive flux monitoring tool with long-term repeatability under continuous operation, we collaborated with the scientific community to develop the kSA ACE to provide them with the stability and resolution that they need,” says CEO Darryl Barlett. “It’s been a challenging product to develop, but we’re very happy with the end result and are looking forward to seeing it in operation on deposition tools across the globe.”
