News

12 November 2008

 

Tegal receives repeat order from LED maker for plasma etch system

Plasma etch and deposition system maker Tegal Corp of Petaluma, CA, USA says that it has received another follow-on order for an additional 901ACS system from what it describes as a leading opto-semiconductor/LED manufacturer to support its capacity expansion for lighting and optical sensor device production. The new system adds to the customer's existing installed base of Tegal 900ACS Series plasma etch systems in use for these applications.

“The Tegal 900ACS tool, with its single-wafer etch configuration, brings improved manufacturing precision to the task of fabricating LEDs,” claims John Almerico, marketing director, Etch Products. Improved manufacturing precision translates to better process reproducibility, better manufacturing reproducibility, higher device yields, and lower operating costs for plasma etch applications, he adds.

The 901ACS is the latest in a series of capacitively coupled diode plasma etch systems produced by Tegal. Over 1500 systems in the 900 Series have been shipped to date. The 900ACS Series is optimized for pad, zero layer, non-selective nitride, backside, and planarization etching, as well as for photoresist descum, oxide, nitride, poly, and compound materials applications for high-brightness LED (HB-LED), optoelectronics, thin-film head (TFH), and micro-electro-mechanical system (MEMS) device fabrication. Among other features, the 900ACS and 980ACS Series platforms incorporate a production-proven transport system that can robustly accommodate the 75-200mm round, square or rectangular substrates found in the opto, TFH, and MEMS markets.

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Visit: www.tegal.com