Aixtron delivers 3x2” CCS MOCVD system to Nagoya University for DUV opto device research

Deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany has delivered a Close Coupled Showerhead (CCS) system to Nagoya University in Japan. Installed at the university’s Institute of Materials and Systems for Sustainability (IMaSS), the 3x2-inch Flip Top CCS metal-organic chemical vapor deposition (MOCVD) platform is intended for research on gallium nitride (GaN)-based deep-ultraviolet (DUV) optoelectronic devices.

Nagoya University is a leading Japanese research institution for semiconductor materials, especially in the field of GaN-based structures. By focusing on the development of DUV devices using Aixtron’s 3x2-inch Flip Top CCS MOCVD tool, IMaSS is targeting a wide range of future-oriented applications in areas such as agriculture, health or water purification.

Designed especially for research and small series production, the Aixtron system enables real scaling from R&D to large series production. The firm says that its Close Coupled Showerhead concept inherently allows extremely uniform and reproducible deposition of various complex, mostly single-crystal materials. The flexibility of the reactor design enables not only further development of existing materials and their application in future devices but also extensive research into completely new materials, their properties and potential applications.

“Our Closed Coupled Showerhead Flip Top reactor is characterized by its easy maintenance and lowest running cost,” says Aixtron’s president Dr Bernd Schulte. “The system is one of the most successful Aixtron products, as proven by numerous orders from universities, laboratories and other research institutions worldwide,” he adds. “We are looking forward to closely cooperate with Nagoya University and its renowned IMaSS.”

Tags: Aixtron MOCVD

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