BluGlass collaborating with Aixtron to scale RPCVD to mass production

BluGlass Ltd of Silverwater, Australia – which was spun off from the III-nitride department of Macquarie University in 2005 – is collaborating with deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany to evaluate BluGlass’ unique remote-plasma chemical vapor deposition (RPCVD) technology.

BluGlass has selected Aixtron’s AIX 2800G4-HT system for scaling RPCVD to mass-production capacities. The semiconductor film uniformity of Aixtron’s Planetary Reactor is attributed to its proprietary dual axis of wafer rotation during deposition. BluGlass' RPCVD technology enables low-temperature deposition of III-V nitride materials, which can potentially improve the performance of devices. The first integration of RPCVD onto the AIX 2800G4-HT will be conducted at BluGlass’ Silverwater facility in Sydney.

“We are very pleased to have the support from Aixtron for this major scaling project of our technology,” comments BluGlass’ managing director Giles Bourne. “This is an important step towards demonstrating the commercial viability of RPCVD in large-scale manufacturing,” he adds.

“At Aixtron, we are constantly striving to bring novel technologies onto our platforms in order to provide our customers with advanced capabilities,” says Aixtron Group’s innovation officer Dr Ken Teo. “We want to explore the potential of RPCVD technology for low-temperature deposition of nitride layers, which may open up new possibilities for opto/electronic devices; we look forward to working with BluGlass in integrating RPCVD and evaluating the technology”.

Tags: BluGlass RPCVD Aixtron

Visit: www.bluglass.com.au

Visit: www.aixtron.com