FBH orders ClassOne’s Solstice S8 system for automated plating and solvent processes

ClassOne Technology of Kalispell, MT, USA (which manufactures electroplating and wet-chemical process systems for ≤200mm wafers) has sold its flagship Solstice S8 wet process tool to the Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH) in Berlin, Germany. As a research institute in the fabrication of III-V compound semiconductors, FBH specializes in prototyping microwave and optoelectronic devices for a diverse range of industries, including communications, energy, health and mobility.

“Solstice is a perfect fit for the III-V compound semiconductor processes that FBH specializes in,” comments Olaf Krüger, head of FBH’s Process Technology Department. “The exceptional flexibility of the Solstice platform will allow FBH to efficiently automate a number of distinct processes on a single tool. We expect to retain the fine-grained control needed in our research environment with the added production benefits of complete cassette-to-cassette automation.”

ClassOne says that FBH is the latest example of a growing trend in the compound semiconductor industry — the need for integrated plating-related processes as part of a comprehensive plating solution. The eight-chamber Solstice S8 will provide FBH with electroplating and wet processing capabilities for a range of processes. In particular, gold plating will be performed by a pair of ClassOne’s GoldPro chambers, and a new high-pressure spray solvent chamber will process highly efficient metal lift-off. ClassOne has dubbed the wide range of plating-related wet processing capabilities on the Solstice platform as ‘Plating-Plus’.

“The configuration flexibility of Plating-Plus and the exceptional quality of our plating chambers are why ClassOne has become the supplier of choice for the compound semiconductor industry,” claims Roland Seitz, director of ClassOne’s European operations. “By placing several related processes on a single tool, FBH will enjoy processing efficiencies and device quality that simply cannot be achieved by any other supplier,” he adds.

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