14 August 2018

Veeco’s GEN10 automated MBE cluster system wins Max Planck Institute tender to support research on oxide-nitride layer structures

© Semiconductor Today Magazine / Juno PublishiPicture: Disco’s DAL7440 KABRA laser saw.

Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA says that its dual-chamber GEN10 automated molecular beam epitaxy (MBE) cluster system has won the tender offer by the Max Planck Institute of Microstructure Physics (MPI-MSP) of Halle (Saale), Germany to support research on complex oxides.

Demand for oxide-nitride layer structures has increased due to their potential in enabling next-generation energy-efficient nano-devices and advanced data storage. The department of Nano-systems from Ions, Spins and Electrons (NISE) at MPI-MSP aims to use Veeco’s MBE technology to expand research and develop innovative applications.

“Our team is highly interested in exploring the properties of atomically engineered oxide-nitride layer structures especially because of their extraordinary properties but also for their potential in paving the way to novel energy-efficient nano-devices,” says Stuart Parkin, director of the NISE at MPI-MSP and Alexander von Humboldt Professor at Martin Luther University Halle-Wittenberg. “Veeco’s reputation and expertise in MBE combined with the GEN10’s high reliability, throughput, customization and automation capabilities will help support our research into novel materials.”

Veeco says that the win at MPI marks the first time that it has provided a fully integrated solution for a concentrated ozone source. The GEN10 allows for up to three configurable material-specific growth modules, enabling high system utilization and allowing multiple researchers use the system at the same time to perform unattended growth. By expanding its reach in the R&D sector worldwide, Veeco is aiding the growth of complex oxide structures.

Veeco’s MBE systems continue to expand their footprint in the global R&D space, says Gerry Blumenstock, VP & general manager of MBE and ALD products. “We are pleased with the confidence Dr Parkin and his team placed in our MBE expertise and we look forward to supporting the MPI-MSP as it continues to lead R&D exploration and applications for complex oxides,” he adds.

Tags: Veeco MBE

Visit: www.mpi-halle.mpg.de/NISE

Visit: www.veeco.com/technologies-and-products/mbe-systems