- News
19 December 2016
Osram Opto orders Veeco GaN MOCVD and PSP systems for new LED production facility in Malaysia
Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA says that Osram Opto Semiconductors GmbH of Regensburg, Germany has completed an agreement naming Veeco as the supplier for metal-organic chemical vapor deposition (MOCVD) and Precision Surface Processing (PSP) systems needed for high-volume LED production at its new facility in Kulim, Malaysia. As part of the agreement, Osram Opto has ordered multiple TurboDisc EPIK700 gallium nitride (GaN) MOCVD systems and WaferStorm 3306 PSP Wet Process systems.
Veeco says that its production-proven TurboDisc and Uniform FlowFlange MOCVD technologies have enabled LED makers to achieve improved cost per wafer savings compared with previous MOCVD systems through enhanced wafer uniformity, reduced operating expenses and increased productivity. The WaferStorm PSP Wet Process System is a solvent-based platform that integrates Veeco's proprietary ImmJET technology for improved yield, higher throughput and lower chemical cost than conventional methods for metal lift-off and other back-end compound semiconductor processes.
"We are pleased that Osram Opto Semiconductors has selected Veeco as a partner in their Diamond initiative," says Veeco's president William J. Miller, Ph.D. "Veeco's WaferStorm platform provides distinct advantages to the back-end wafer cleaning process," he adds. "As we move forward with this exclusive multi-year partnership, we plan to support Osram's impressive expansion plans with advanced Veeco technology and process expertise."
Osram investing €3bn in lighting by 2020
Veeco MOCVD Wet processing Osram