- News
26 April 2016
HC SemiTek collaborates to explore BluGlass' RPCVD for low-temp p-GaN in green LEDs and AlN-on-sapphire for HB-LEDs
BluGlass Ltd of Silverwater, Australia is beginning a collaboration in which LED epitaxy and chip maker HC SemiTek Corp of Wuhan, China (which supplies full-color ultra-high-brightness LED products throughout China) will review the advantages of its remote plasma chemical vapor deposition (RPCVD) for low-temperature deposition of p-GaN in green LEDs and will also explore low-temperature deposition of aluminium nitride (AlN) on sapphire substrates for use in high-brightness LEDs. HC SemiTek will supply 4-inch wafers to BluGlass to deposit RPCVD films, then HC SemiTek will fabricate LED devices for testing.
Spun off from the III-nitride department of Macquarie University of Sydney, Australia in 2005, BluGlass developed a low-temperature process using RPCVD to grow materials including gallium nitride (GaN) and indium gallium nitride (InGaN) on glass substrates. By growing critical semiconductor materials at lower temperatures, manufacturers can produce higher-performing devices such as LEDs and power electronics at lower cost, BluGlass says. The firm holds patents in key semiconductor markets including the USA, China, Europe and Japan.
Commercial interest is building in the capability of RPCVD technology, says managing director Giles Bourne. "We now have three industry evaluations in place with companies that have respected leadership positions in their relative markets," he adds. "This forms part of our key strategy to complete our industry acceptance phase as we progress towards commercializing our proprietary RPCVD technology."
The new agreement with HC SemiTek is expected to take several iterations to demonstrate the performance capability, and will involve BluGlass' new RPCVD chamber (designed to improve the uniformity of the RPCVD deposition). This chamber is expected to be commissioned in the coming months.