1 May 2015

k-Space adds auto-exposure capability to RHEED analysis system

k-Space Associates Inc of Dexter, MI, USA (which supplies thin-film metrology tools for the semiconductor, compound semiconductor and solar markets) has announced a new auto-exposure capability available for the kSA 400 analytical reflection high-energy electron diffraction (RHEED) system.

The auto-exposure control feature automatically adjusts the exposure time of the kSA 400 camera as the RHEED pattern intensity increases or decreases so that signal saturation or low signal levels do not occur and important data is not lost. The intensity measured in user-specified regions is automatically scaled with the exposure time so that both the real-time plots and recorded data reflect the correct intensity over the course of the acquisition. This feature is included with all new kSA 400 software upgrades and kSA 400 system purchases.

"RHEED patterns inherently have a very large dynamic range," notes CEO Darryl Barlett. "In addition, the pattern can change significantly during deposition, due to interference, roughening, desorption, etc," he adds. "By utilizing the large exposure time range of the kSA 400 cameras, we can compensate in real-time for the changing RHEED pattern, assuring that adequate data is collected throughout an entire deposition run or surface study. It's similar to using an auto gain control capability on video cameras, except in this case the integrity of the absolute intensity values is maintained."

kSA 400 analytical RHEED systems are used in molecular beam epitaxy (MBE), pulsed laser deposition (PLD), sputtering and other thin-film deposition chambers, providing important feedback for growth rate, surface roughness, lattice spacing and structural analysis.

Tags: k-Space Associates

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