4 August 2015

Asahi Kasei orders Aixtron CCS MOCVD system to start commercial production of DUV LEDs

Equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany says that Tokyo-based chemical company Asahi Kasei has ordered a Close Coupled Showerhead system (CCS) metal-organic chemical vapor deposition (MOCVD) system, for delivery in third-quarter 2015, for pilot production of deep ultraviolet (DUV) LEDs based on aluminium gallium nitride (AlGaN).

Picture: Aixtron's Close Coupled Showerhead system, in 6x2''-wafer configuration.

Aixtron says that Asahi Kasei's decision to purchase a Showerhead reactor for DUV LED production is based on the positive experience with a previous MOCVD tool already in operation. It chose Aixtron's proven CCS technology again as it enables the optimization of the chamber geometry for both high- and low-pressure regimes by the additional dynamic chamber height adjustment.

"Our MOCVD tool enables pilot production as well as R&D applications with processes that are directly scalable to larger systems," says Aixtron's executive VP & chief operating officer Dr Bernd Schulte. "Enhanced by the reliable 3-zone heater, the system also provides excellent temperature uniformity," he adds. "This leaves Asahi Kasei with a very flexible, high-quality tool, perfectly matching the increasing demand for high-performance deposition systems for new application fields such as DUV LEDs."

High-performance DUV LEDs are used for purification and sterilization in applications including industrial and point-of-use (POU) water purification. DUV LEDs are also used in scientific and industrial instruments to measure the purity of water, air, surfaces and biological samples.

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Asahi Kasei acquires Crystal IS

Tags: Aixtron MOCVD Asahi Kasei Crystal IS UVC LEDs

Visit: www.asahi-kasei.co.jp

Visit: www.aixtron.com