- News
12 November 2014
Taiyo Nippon Sanso to install GaN MOCVD system at Epistar
Taiyo Nippon Sanso Corp (TNSC) of Tokyo, Japan is to install its UR25K mass-production gallium nitride (GaN) metal-organic chemical vapor deposition (MOCVD) system (in 7 x 6-inch wafer configuration) at Taiwan’s largest LED chipmaker Epistar Corp in Hsinchu Science-based Industrial Park. The system will be used for the development of light-emitting diodes (LEDs) grown on 6-inch sapphire substrates.
TNSC says that, with the two firms’ foresight into the 6-inch LED market, it will be working with Epistar to improve the hardware aspects of the equipment. Epistar and TNSC aim to improve and develop 6-inch MOCVD mass production of LEDs.
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Epistar qualifies Veeco’s new EPIK700 MOCVD system for high-volume LED production
Taiyo Nippon Sanso MOCVD GaN HB-LEDs Epistar