21 May 2014

Brewer Science commercializes megasonic developer for MEMS and compound semiconductor applications

Brewer Science Inc of Rolla, MO, USA, which provides thin-wafer-handling materials, processes and equipment, has announced the first commercial placement of a Cee 300MXD megasonic developer. The developer was commissioned by MicroChem Corp (MCC) of Newton, MA, USA, which manufactures specialty chemicals including photoresists, optical dyes and ancillary materials for micro-electro-mechanical systems (MEMS), microelectronics, lithography, specialty displays, packaging, and optoelectronics applications.

The Cee 300MXD megasonic developer applies uniform acoustic energy to spinning substrates to gently dissolve and remove films and residues without damaging fragile device structures. This precision handling results in stable dimensional control of vertical profiles uniformly across the wafer surface, enabling fabrication of high-aspect-ratio structures for the MEMS, display, compound semiconductor, and advanced packaging markets. Applications include radio-frequency (RF) power, MEMS, sensors, and acoustic wave devices used for wireless communication.

“As the MEMS industry and integrated packaging technology continue to demand higher-aspect-ratio structures for TSV and RDL layers, enhanced development techniques will likely become mainstream,” comments MicroChem’s applications engineering manager Michael Stan. “The cost-effective approach being pioneered by Brewer Science gives a supplier such as MicroChem Corp the advantage of being able to rapidly prototype formulations and processes to meet these demands,” he adds.

“The Cee 300MXD developer features state-of-the-art technology that creates a viable pathway for our customers to decrease process cycle times, reduce cost of ownership, and accelerate time to market,” reckons Brewer Science’s equipment technology strategist Justin Furse. “The Cee 300MXD megasonic developer gives customers a bridge from the lab to production by allowing them to avoid significant capital investment,” he adds. “Our semi-automated equipment delivers quality and precision comparable to automatic multimillion-dollar tools and is suitable for low-volume prototyping with a seamless transition to high-volume manufacturing.”

Tags: Brewer Science

Visit: www.microchem.com

Visit: www.brewerscience.com/developers