18 June 2014

Jiuce Gas installs SAES palladium hydrogen purifier at Fujian Fushun Microelectronics

SAES Pure Gas Inc of San Luis Obispo, CA, USA (a member of the SAES Group), which makes gas purifiers for semiconductor and LED fabrication facilities, has supplied a MegaTorr palladium hydrogen purifier to Fujian Jiuce Gas Group for providing ultra-high-purity hydrogen at the Fujian Fushun Microelectronics semiconductorfacility in Fuzhou, China.

“Our customer requires a reliable supply of hydrogen with sub-ppb gas quality,” says Fujian Jiuce Gas Group general manager He Jingyu. “We selected SAES Pure Gas because their palladium technology offers consistent gas purity regardless of inlet gas quality variation,” he adds. “We recently ordered an additional palladium purifier to support further growth at Fujian Fushun 4” and 6” fabs.”

Each MegaTorr palladium hydrogen purifier for Fujian will flow up to 65Nm3/hr. The patented micro-channel palladium membrane technology removes all impurities from the hydrogen gas source. The technology is suitable for compressed gas sources from 99.99% to 99.9999% inlet purity, says SAES Pure Gas. The purifier includes fully automated control systems with greatly reduced operating costs in a very small footprint, the firm adds.

“This installation continues our strong support of the semiconductor industry in China,” says Stuart Bestrom, Palladium Purification sales manager at SAES Pure Gas. “Our Shanghai-based sales and service center will provide start-up and service during and after installation.”

Tags: hydrogen purifiers SAES

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