3 January 2014

MEI wins first order from Taiwan, for batch copper and titanium wet etch of 200mm compound semi or MEMS wafers

MEI Wet Processing Systems and Services (a subsidiary of MEI LLC) of Albany, OR, USA has received an order from a Taiwan-based customer for its advanced etch solution, based on MEI’s Revolution Wet Processing System, a semi-automated rotary system designed for batch wet processing (etch or solvent) for semiconductor and MEMS (micro-electromechanical system) applications.

The shipment marks MEI’s entrance into the Taiwanese market. The wet bench will be used for copper etch and titanium etch wet chemical processing of 200mm compound semiconductor or MEMS wafers.

“This is a prime example of the advanced etch applications market that MEI specializes in supporting,” says sales manager Ed Jean. “Most wet process equipment suppliers tend to focus on either single-wafer processing or generic equipment sales,” he adds. “There is a real need for semiconductor processing solutions that focus on challenging applications solutions, and MEI Wet Processing Systems and Services is meeting these specialized application needs, including proprietary advanced etch, gold etch, InGaP etch and patented metal lift-off solutions.”

Tags: MEI LLC Wet processing systems

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