6 March 2012

Oxford Instruments hosting Nanoscale Plasma Processing Seminar in Shanghai

Following its seminar hosted with the Institute of Semiconductors, Chinese Academy of Sciences (IOS-CAS) in Beijing last year (attended by over 100 participants), UK-based Oxford Instruments is holding a one-day seminar in Shanghai on 19 March, the day before the start of the Semicon China 2012 trade show (20-22 March).

Focussing on Nanoscale Plasma Processing, the event will feature talks by invited guest speakers (specialists from China, Taiwan and Europe) in addition to Process and Applications experts from Oxford Instruments Plasma Technology (OIPT).

The academic and industrial experts will discuss topics including atomic layer deposition (ALD), photovoltaics (PV), deep silicon etch, and ion beam technologies.

Talks from guest speakers include:

• ‘Introduction to ALD and its applications, including photovoltaics’, by professor Erwin Kessels of the University of Eindhoven (TU/e), The Netherlands;
  

• ‘Etch & deposition process in the OPTO and MEMS application device’, by Dr Chu Ann-Kuo, professor in the Department of Photonics, National Sun Yat-sen University, Taiwan;

• ‘Infrared Focal Plane Arrays (IRFPAs) detector for space applications’, by Dr Zhenghua Ye of SITP (Shanghai Institute of Technology Physics);

• ‘Micro/Nano fabrication and characterization of Si field electron emitter’, by guest speaker Dr Juncong SHE of Sun Yat-Sen University, China; and

• ‘ALD used in the MEMS application’, by Jerry Wang, manager of the Microsystems Technology Center, ITRI, Taiwan.

“Our seminars are a great opportunity for the plasma processing community to come together, to share their experiences, and to learn more from leading international experts in their field,” says OIPT’s Asia business manager Jeffrey Seah, who will open the seminar.

Based on the success of the 2011 seminar in Beijing, Oxford Instruments anticipates a high level of interest from both academic and production participants. Although the event is free to attend, booking is necessary, by e-mailing either process.news@oxinst.com or lingling.wang@oxinst.com.

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