12 January 2012

Aixtron installs another Black Magic system for CNT and graphene deposition at Portugal’s INESC

Deposition equipment maker Aixtron SE of Herzogenrath, Germany says that its support team for Europe has installed and commissioned another Black Magic deposition system for carbon nanomaterial deposition at the INESC Microsistemas e Nanotecnologias (INESC MN) in Lisbon, Portugal.

“My current research is focused on the controlled fabrication of CNTs [carbon nanotubes] and related nanostructures for electronic applications,” says Dr Sara Vieira, principal investigator of the CNT research group at INESC MN. “The Black Magic system has already proved itself to be indispensible for our current work. Our activities are centered on nanofabricated field-emission sources, and the system is capable of depositing aligned CNTs with the desired field-emission characteristics,” she adds. “Furthermore, the system, with its flexible process window and plasma capabilities, has enabled us to fabricate single-, double- or multi-walled carbon nanotubes.”

“I am especially impressed with the design and engineering of the Black Magic system; it is ergonomic, easy to use and reproducible in so many respects and, most importantly, it is also capable of growing graphene, which also has many potential uses in future nanoelectronics,” Vieira continues. “The system provides my group with the ability to independently produce high-quality material and the opportunity to initiate new joint projects with other institutions requiring such CNTs and related devices.”

INESC Microsistemas e Nanotecnologias (INESC MN) is a private, non-profit research and development institute that was created in 2002 from the Solid State Technology group of INESC. INESC MN operates a Class 10/100 cleanroom with optical and electron-beam lithography, allowing nanoscale device fabrication. It is dedicated to R&D in strategic technological areas of micro- and nano-technologies as well as the application of such technologies to electronic, biological and biomedical devices.

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