- News
29 February 2012
Epistar receives its first Aixtron CRIUS II-XL MOCVD system
Deposition equipment maker Aixtron SE of Herzogenrath, Germany says that existing customer Epistar Corp, a manufacturer of optoelectronic materials and devices in Taiwan, has received its first CRIUS II-XL system (in 19x4-inch wafer configuration). The system will be used to mass produce ultra-high-brightness (UHB) blue and white LEDs.
The CRIUS II-XL system has passed the process demonstration and acceptance test. In line with their usual procedure, Epistar will now further qualify the system in mass production. Epistar plans to purchase more CRIUS II-XL systems when they expand their production capacity. “Looking at this first tool, I can see that the CRIUS II-XL will make a huge difference to our productivity,” notes Epistar’s president Dr Ming-Jiunn Jou. “Thanks to its seamless process compatibility with our earlier-generation reactors, the latest CRIUS technology is set to rapidly and efficiently drive forward future capacity expansion and technology advances,” he reckons.
“With the purchase of our latest system, the CRIUS II-XL, Epistar continues to pursue its cutting-edge production and engineering innovation in epitaxial growth,” comments Aixtron’s chief operating officer Dr Bernd Schulte. “The CRIUS II-XL design concept offers the largest productivity with best-in-class uniformities, which massively increases yield and directly translates into enhanced competitiveness for Epistar’s products in an ever demanding marketplace,” he adds.
Located at the Hsinchu Science-based Industrial Park in Taiwan, Epistar has for over a decade been focused on the development, manufacture and marketing of UHB LED products. Using its proprietary MOCVD process technology, it continues to commercialize a full range of UHB LEDs.
Launched by Aixtron last November, the CRIUS II-XL configuration offers a reactor capacity as high as 19x4 inch wafers (up 46% on the original CRIUS II), giving it the highest throughput and lowest cost of ownership in the LED industry, it is claimed.
Aixtron launches 19x4-inch CRIUS II-XL MOCVD reactor
Aixtron MOCVD Epistar CRIUS II-XL
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