23 February 2012

IIT Pisa orders two Aixtron BM Pro systems for graphene deposition

Deposition equipment maker Aixtron SE of Herzogenrath, Germany says that the Italian Institute of Technology (IIT) in Pisa, Italy, has ordered two Aixtron BM Pro systems (“BM Pro” is the new product name for Aixtron’s Black Magic system) in a 4-inch wafer configuration. IIT Pisa researchers will use the systems to develop and produce graphene for the implementation of novel hydrogen storage systems.

One system will be used to deposit graphene, using both chemical vapor deposition (CVD) and plasma enhanced chemical vapor deposition (PECVD). The second system is configured for high temperature (1800°C) processing with graphene to be formed using sublimation. Aixtron’s local support team has installed and commissioned the systems at the Power Nanosystems Laboratory at IIT Pisa’s Center for Nanotechnology Innovation, located at Laboratorio NEST of Scuola Normale Superiore (IIT@NEST).

“Aixtron deposition systems have a world-class reputation for depositing highly uniform, reproducible thin films. Our new BM Pro systems form the foundation of our research into the synthesis of graphene films for applications like nanoelectronics and energy storage. These systems will give us enormous flexibility in terms of deposition processes, covering CVD, PECVD and high temperature sublimation. This is highly important as it will enable us to use the best method of producing graphene films with the necessary characteristics for each particular application. Graphene film quality, uniformity, equipment ease of use, and recipe reproducibility were key factors during our evaluation process and it was evident that Aixtron’s BM Pro system is the best equipment available that meets all these requirements,” said Dr Camilla Coletti of IIT@NEST.

See: Aixtron Company Profile

Tags: Aixtron Black Magic Graphene

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