- News
16 August 2012
Jilin University orders Aixtron reactor for GaN UV and white LED research
Deposition equipment maker Aixtron SE of Herzogenrath, Germany says that it has received an order from existing customer Jilin University of Changchun, China for a Close Coupled Showerhead (CCS) metal-organic chemical vapor deposition (MOCVD) system in 3x2”-wafer configuration, which will be dedicated to the growth of gallium nitride (GaN) materials for ultraviolet and white LEDs. One of Aixtron’s local support teams has installed and commissioned the reactor.
“We already have experience and a very good understanding of Aixtron systems, and we were particularly impressed with the reactor’s ergonomics and security,” comments Dr Zhang of the Jilin University, State Key Laboratory on Integrated Optoelectronics. “Our intention is to develop exciting new material structures that will lead to greater understanding and to production of gallium nitride materials for UV and white LEDs,” he adds. “The combination of the process technology capabilities of the CCS reactor and strong backing from the local Aixtron support team will enable us to achieve our aims quickly and efficiently.”
Tags: Aixtron MOCVD UV LEDs White LEDs GaN