3 March 2011

Oxford Instruments Optoelectronics Laboratory opened at ITRI

The official ceremony to celebrate the opening of the Oxford Instruments Optoelectronics Laboratory at the Industrial Technology Research Institute (ITRI) in Hsinchu, Taiwan has taken place, attended by dignitaries from both organizations and key customers of UK-based etch, deposition and growth system maker Oxford Instruments.

ITRI’s president Dr Jyuo-Min Shyu and Oxford Instruments’ chief executive Jonathan Flint opened the laboratory, and also in attendance were David Campbell, director, British Trade and Cultural Office, Taiwan, and Yung-miao Wang, a senior specialist in the Department of Industrial Technology (DoIT) of the Ministry of Economic Affairs (MOEA).

The opening follows the signing in early February of a research-based collaboration agreement, based on Oxford Instruments providing a high-brightness light-emitting diode (HB-LED)-related process research center staffed by the firm’s process engineers at ITRI, benefitting both ITRI and Oxford Instruments’ extensive Far Eastern customer base.

Oxford Instruments said at that time that it would be installing several more systems in ITRI’s cleanroom, and that its process engineers would have the use of this and selected other equipment at the institute in order to provide process demonstrations and to support customers in the Far East in the performance of their tools. Oxford Instruments also said that this would in effect expand its research capabilities so that it can provide its process offering more effectively to customers in Asia. Oxford Instruments already had a number of systems installed at ITRI including a PlasmaPro System100 multi-chamber cluster tool incorporating plasma-enhanced chemical vapor deposition (PECVD), reactive ion etching (RIE) and atomic layer deposition (ALD), a PlasmaPro System100 ICP380 plasma etch tool, and a PlasmaPro System80Plus PECVD plasma deposition tool. Three further systems have been installed in the Optoelectronics Laboratory — a PlasmaPro NGP1000 PECVD system, a PlasmaPro NGP1000 Etch system, and a PlasmaPro System133 ICP380 — with additional tools following in the next phase.

“ITRI’s mission is three-fold: to expedite the development of new industrial technologies, to aid the process of upgrading industrial technology techniques, and to establish future industrial technology,” said Shyu at the opening. “Collaborations such as this one with Oxford Instruments allow us to achieve our goals and stimulate relationships globally with important players in the nanotechnology arena,” he adds.

“We are here to celebrate a research-based collaboration that will advance Taiwan’s industry through the creation of a center of expertise built around Oxford Instruments’ core technologies in plasma-enhanced etch, deposition and fabrication,” commented Flint. “This relationship offers the opportunity for research staff from ITRI, process engineers and customer support staff from Oxford Instruments, and our customers to work together for mutual success.”

See related items:

Taiwan’s ITRI and Oxford Instruments agree research collaboration

See: Oxford Instruments Company Profile

Tags: Oxford Instruments ITRI HB-LEDs

Visit: www.oxford-instruments.com

Visit: www.itri.org.tw/eng

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