7 March 2011

LED maker Tekcore installs first of seven Dow VaporStation systems

Dow Electronic Materials of Philadelphia, PA, USA (a business unit of Dow Advanced Materials) says that Taiwan-based LED wafer and chip manufacturer Tekcore Co Ltd has recently installed two VaporStation Central Delivery Systems in its LED manufacturing area.

Tekcore is now running the first tool in production to deliver trimethylgallium (TMG) to multiple epitaxial growth reactors. The second delivery system, Dow’s new patent-pending, third generation of the VaporStation Central Delivery System, has also been installed at Tekcore and ramp up for production has started. The systems are the first of seven that Tekcore has ordered from Dow Electronic Materials.

The VaporStation Central Delivery System is designed to deliver TMG and other metal-organic precursors to multiple chemical vapor deposition (CVD) reactors from a central supply source cabinet using a high-purity carrier gas. Dow says that this delivery technology enables users to run several reactors with no downtime for precursor cylinder change, providing significant opportunity for increased reactor throughput and lower cost of ownership. Also, as a result of less material handling, the tool provides greater safety in production areas.

“We are very pleased with the successful integration of the VaporStation Central Delivery System into Tekcore’s production line,” says Joe Reiser, global business director, Metalorganic Technologies, for Dow Electronic Materials. “They quickly began to benefit from the delivery system’s throughput, economy and safety advantages.” Manufacturers are seeking ways to eliminate costly inefficiencies, such as calibration runs and cylinder change-outs associated with on-board cylinders, he adds.

High-quality materials and precise delivery of metalorganic precursors are essential to fabricating reliable LEDs, says Dow Electronic Materials, which claims to be the leading supplier of precursors (including TMG) to the LED market.

See related items:

Dow Electronic Materials to expand TMG capacity to serve LED market

Tekcore to raise $47m to grow from 28 to 46 MOCVD reactors by end 2010

Tekcore orders multiple new-generation Aixtron AIX G5 HT systems

LED chip-maker Tekcore raising capital to fund MOCVD purchases

Tags: Tekcore LEDs Dow Electronic Materials TMG

Visit: www.dow.com

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