7 February 2011

Veeco launches MOCVD multi-reactor system for HB-LEDs

Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA has launched the TurboDisc MaxBright gallium nitride (GaN) metal-organic chemical vapor deposition (MOCVD) multi-reactor system for production of high-brightness light-emitting diodes (HB-LEDs). The firm says that MaxBright has already been accepted by a leading LED maker and that it is currently shipping systems to additional manufacturers in Korea, Taiwan and China.

Picture: TurboDisc MaxBright GaN MOCVD multi-reactor system.

MaxBright leverages Veeco’s Uniform FlowFlange technology and automation expertise by combining multiple, new, high-throughput MOCVD reactors in a modular two- or four-reactor cluster architecture. The MaxBright reactors, based on the production-proven K465i, feature both expanded wafer capacity and proprietary, closed-loop thermal control technology. The reactors achieve 25% higher throughput than the standard K465i, while extending its performance advantages (uniformity, repeatability and material quality). The MaxBright system offers what Veeco describes as industry-leading wafer capacity of up to 216 x 2”, 56 x 4”, 24 x 6” or 12 x 8” wafers. In addition, seamless recipe transfer from K465i to MaxBright enables users to achieve rapid production start.

“It’s the highest-productivity MOCVD system for HB-LED manufacturing on the market,” says William J. Miller Ph.D., executive VP of Veeco’s Compound Semiconductor business. “The architecture enables single-chamber or multi-chamber layer growth capability, increasing process flexibility for demanding LED structures,” he adds. “MaxBright’s compact architecture also enables a footprint efficiency gain of up to 2.5 times standalone MOCVD systems. Overall, MaxBright delivers a 500% productivity gain compared to the K465i in a flexible and compact package,” Miller continues.

“Veeco has dramatically accelerated our MOCVD technology investment and new product development programs to further reduce LED manufacturing costs,” comments CEO John R. Peeler. The new, high-productivity system is part of Veeco’s multi-generational roadmap for improving MOCVD process capability and capital efficiency. “MaxBright will enable the industry to accelerate its transition to LED lighting,” he adds. “In 2010, the K465i became the market-leading MOCVD system. And now, MaxBright further extends Veeco's product leadership position as the most productive and lowest cost-of-ownership MOCVD tool on the market,” Peeler says.

See: Veeco Company Profile

Tags: Veeco MOCVD GaN HB-LEDs

Visit: www.veeco.com

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