8 December 2011

Altatech enters LED inspection market with AltaSight LEDMax

Altatech Semiconductor S.A. of Montbonnot, near Grenoble, France, which makes wafer inspection and analysis, liquid-vaporization chemical vapor deposition (CVD) and nanoprinting equipment, has entered the LED inspection market by introducing the AltaSight LEDMax system, its first product designed specifically for detecting, classifying and characterizing defects on wafers used in manufacturing LEDs.

AltaSight LEDMax is claimed to improve production yields for LED devices by accurately detecting process-induced defects, including those that can result during metal-organic chemical vapor deposition (MOCVD) of epitaxial layers, subsequent patterning processes and final inspection. Using patented sensor technology that filters out all background noise, the non-contact system generates images of surface imperfections with resolution down to 1 micron and a unique depth-of-focus capability approaching 500 microns.

An integrated review station performs real-time analysis of the gathered inspection data. It can stitch together images from different perspectives, generate 3D renderings and measure defect sizes. All defect-detection results are stored within the system, and can be output to an operator in standard file formats.

“With its multi-class defect reporting and high accuracy, our newest inspection system meets the unique needs of LED manufacturers,” claims president Jean-Luc Delcarri. “Altatech is entering this market by providing a defect-detection solution that traditional semiconductor-inspection tools cannot match in terms of reliability and cost-efficiency,” he reckons.

The highly flexible design enables AltaSight LEDMax to combine up to three inspection modules, allowing it to be used in volume manufacturing, process development or R&D applications.

In addition to handling the full range of compound semiconductor wafers on which LEDs are currently produced, AltaSight LEDMax also has the versatility to meet other III-V inspection requirements, accommodating sapphire, silicon, silicon carbide and other transparent surface substrates. The system’s flexibility and reliability extends to its ability to inspect thin and thick wafers as well as significantly bowed substrates. Also, it can handle 4- to 8-inch wafers without any hardware changes, and a field-upgradeable option for handling 2-inch substrates will be available in the coming months.

Production units will be shipped to customers in first-quarter 2012.

Tags: Altatech LED inspection

Visit: www.altatech-sc.com