- News
6 December 2011
Forepi converts Aixtron CRIUS II order to new 19x4“ CRIUS II-XL system
Deposition equipment maker Aixtron SE of Herzogenrath, Germany says that in fourth-quarter 2011 it will deliver a CRIUS II-XL metal-organic chemical vapor deposition (MOCVD) reactor in 19x4-inch configuration to Taiwan’s Forepi Ltd. The order was received in third-quarter 2011, initially for the CRIUS II-L version, but was immediately converted into an order for the new XL-configuration following its launch.
The CRIUS II-XL reactor has been acquired for the volume production of InGaN-based blue high-brightness (HB) LED epiwafer materials. One of Aixtron’s local support teams will install and commission the system.
“The acquisition of this 4-inch wafer capable Showerhead system reflects a milestone for Forepi,” comments Forepi president Dr Fen-Ren Chien. “Initially, we had been considering the CRIUS II-L to be a candidate tool for the next stage in our expansion plans. When the XL version was introduced recently, we were impressed by the performance of the 19x4-inch configuration,“ he adds.
“The CRIUS II-XL system offers the world‘s highest throughput and productivity,” says Aixtron’s chief operating officer Dr Bernd Schulte. “Any existing process on CRIUS II can be smoothly transferred to CRIUS II-XL. Changing from one wafer size to another only requires a simple carrier plate exchange without further hardware or process adjustment,“ he adds. “All these aspects greatly assist wafer manufacturers seeking to keep InGaN LED manufacturing costs under tight control.”
Forepi was incorporated in November 1999 as a dedicated pure-play manufacturer of InGaN HB-LED wafers and chips. Currently, it offesr a product range that covers the full spectrum of LEDs including InGaN blue, green and near-UV HB-LEDs for markets in Taiwan as well as South Korea, Hong Kong, the USA and China.
Aixtron launches 19x4-inch CRIUS II-XL MOCVD reactor
Aixtron MOCVD HB-LEDs Forepi CRIUS II-XL
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