30 August 2011

Forepi orders multiple Aixtron CRIUS II reactors to boost blue HB-LED capacity

Deposition equipment maker Aixtron SE of Herzogenrath, Germany says that in first-quarter 2011 it received an order for multiple 55x2-inch CRIUS II metal-organic chemical vapor deposition (MOCVD) systems from existing customer Formosa Epitaxy Inc (Forepi), for delivery between the second and fourth quarters of 2011.

The new reactors will be installed and commissioned by one of Aixtron’s local support teams in Forepi's production complex in Taiwan, and dedicated to the volume production of materials for blue high-brightness (HB) LEDs.

“The CRIUS II will give us much needed enlarged production capacity,” says Forepi’s president Dr Fen Ren Chien. “Since the CRIUS II has grown from 31x2-inch to 55x2-inch wafers, the new reactors will play a key role in our future expansion plans for blue HB-LED production,” he adds.

“I have been extremely pleased with the performance of our existing Aixtron MOCVD production systems and the high quality of service the local team has given us,” Chien comments. “Once we had built up experience with our single CRIUS II, we quickly decided to ramp up production with further CRIUS II reactors so as to benefit from the technical advantages of the Aixtron next-generation Close Coupled Showerhead (CCS) technology. The CRIUS II gives us the highest growth rates and growth pressure as well as zero particle generation and minimized maintenance,” he continues.

“The Aixtron CRIUS series continues to build on its solid worldwide reputation for process economics, control and uptime,” says chief operating officer Dr Bernd Schulte. “Its unique CCS reactor chamber technology only requires the application of area-scaling factors for simple process transfer, which is particularly useful for customers like Forepi,” he adds. “The CRIUS II can, if required, be upscaled to larger wafer sizes, which is crucial for control of GaN LED manufacturing costs. Alternatively, the reactor chamber can accommodate as many as 13x4-inch wafers.” 

See: Aixtron Company Profile

Tags: Aixtron MOCVD Blue LEDs Forepi

Visit: www.forepi.com.tw

Visit: www.aixtron.com