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Deposition equipment maker Aixtron AG of Aachen-Herzogenrath, Germany has received an order from ETH Zurich for a Black Magic Plasma Enhanced CVD system to be installed at the Nanotechnology Center (a public private partnership between IBM Research and ETH Zurich) in Ruschlikon, Switzerland.
To be commissioned by Aixtron’s local support team in
Q1/ 2011, the system will be used for single wall carbon nanotube deposition.
“We have been looking for a system that is flexible enough to fulfill the requirements of a multi-user lab serving both ETH and IBM. Aixtron’s Black Magic system fulfills this requirement and will fit to our needs when we kick off advanced carbon nanomaterial research at the Nanotechnology Center,” said Dr Christofer Hierold, Professor of Micro and Nanosystems, Department of Mechanical and Process Engineering at ETH Zurich.
Black Magic systems use unique rapid heating and plasma technologies which have been field-proven since 2005, says Aixtron. They have enabled many research institutions all over the world to produce carbon nanotubes and graphene.
See related items:
ETH Zurich orders Aixtron Black Magic tool
Search: Aixtron ETH Zurich Black Magic
Visit: www.zurich.ibm.com/nanocenter
Visit: www.eth.ch
Visit: www.aixtron.com
For more: Latest issue of Semiconductor Today