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9 February 2010
UCSB orders Aixtron Black Magic PECVD system
Deposition equipment maker Aixtron AG of Herzogenrath, Germany says it recieved an order from the University of California, Santa Barbara (UCSB), USA, for a 6” Black Magic Plasma Enhanced CVD (PECVD) system in Q3/2009.
The combined thermal CVD and plasma enhanced CVD tool is due to be delieved to UCSB’s Nanoelectronics Research Lab, under Professor Kaustav Banerjee, in Q1/2010, where it will be used for graphene and carbon nanotube (CNT) growth
Aixtron says that its PECVD system uses unique rapid heating and plasma technologies which have been proven in the field since 2005, and has enabled customers to produce various types of nanotubes, including low temperature, multiwall, singlewall and supergrowth nanotubes.
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