13 December 2010

OIPT ships five-module cluster tool to Robert Bosch for PV R&D

UK-based equipment maker Oxford Instruments Plasma Technology (OIPT) has shipped a five-module cluster system for use in R&D by Robert Bosch of Stuttgart, Germany, which develops and manufactures wafer-based and thin-film silicon solar cells characterized by high, stable output with narrow output tolerance.

OIPT’s System100Pro deposition tool is a Hex Handler‚ which provides capabilities for several deposition technologies, allowing multiple process steps to be carried out without a vacuum break.

The firm says that its cluster systems offer high-vacuum options for the handler and process modules, resulting in reduced background contamination levels, and the ability to cluster different deposition technologies. The system delivered to Bosch also incorporates a high-temperature substrate table option up to 700ºC, and flexibility of power ramping within the software, and low-power plasma strike options, minimizing potential damage at the start of process. Some of the technology was developed under the EC-supported contract FP7-Energy-2009-1 - 241281 ‘ThinSi’.

“This five-module tool for such a prestigious customer has allowed us to successfully integrate multiple technologies into the cluster, such as the ability to run both ALD and plasma CVD aluminum oxide depositions,” says OIPT’s sales & customer support director Mark Vosloo. “With the increasing trend towards generating energy by renewable means, we are establishing ourselves as a key supplier to the growing PV R&D market,” he adds.

See related items:

OIPT wins order from silicon solar cell manufacturer

See: Oxford Instruments Company Profile

Tags: OIPT System100Pro ALD CVD

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