News

8 October 2009

 

KAUST places follow-on orders with Oxford Instruments

UK-based etch and deposition equipment maker Oxford Instruments (OI) has received follow-on orders from the King Abdullah University of Science and Technology (KAUST) in Saudi Arabia, which was inaugurated on 23 September.

The latest orders are for an Ionfab300 Plus, ion beam etch tool, and a second FlexAL atomic layer deposition tool, bringing the total number of OI systems ordered by KAUST to thirteen. These tools will equip KAUST’s Nanofabrication Core research facility, and add to the initial order for key Oxford Instruments Plasma Technology (OIPT) systems that included several Plasmalab System100 tools for RIE and ICP etch, and PECVD, and a FlexAL atomic layer deposition tool.

“As the need for equipment in our new Nanofabrication Core Lab increased, we decided to extend our order with Oxford Instruments. The scope and performance of OIPT tools for nano-material fabrication made them the natural choice for our requirements in etching, deposition and growth,” said Professor Tony Eastham, director of Laboratories at KAUST.

OIPT’s sales director Mark Vosloo added: “Earlier this year we were extremely pleased to receive our first multiple-system order from KAUST University, and to be involved with such a large and important research institute from the start. This second order from KAUST confirms that OIPT tools are the systems of choice for this important Saudi Arabian facility…”

See related item:

OIPT wins three-system order from Melbourne Centre for Nanofabrication

See: Oxford Instruments Company Profile

Search: OIPT Ion beam etch FlexAL ALD Etch PECVD

Visit: www.kaust.edu.sa

Visit: www.oxford-instruments.com