News

19 March 2009

 

Rohm and Haas’ VaporStation central delivery system installed at Aixtron

Rohm and Haas Electronic Materials of North Andover, MA, USA says one of its VaporStation central delivery systems has been installed and is now operational at the Applications and Demonstration Center of Aixtron AG in Aachen, Germany.

Metalorganic chemical vapor deposition (MOCVD) equipment maker Aixtron is using the VaporStation central delivery system to deliver trimethylgallium (TMGa) to a CRIUS MOCVD reactor and a Planetary MOCVD reactor. More MOCVD reactors are expected to be connected to the system.

The VaporStation, developed by Rohm and Haas, is designed to deliver TMGa and other metalorganic precursors to multiple MOCVD reactors from a central supply source cabinet using a high-purity carrier gas. The firm says that the delivery technology improves the economy and the safety of the MOCVD process (through the reduction of cylinder changes and handling) as well as enabling manufacturers of compound semiconductor devices such as LEDs, solar cells and laser diodes to further reduce production costs. In the case of LEDs, the VaporStation can help manufacturers to more quickly reach cost parity with conventional general lighting production, it is claimed.

“The delivery of TMGa from a central unit reduces the footprint of our systems, and this is an important consideration for our customers using expensive cleanroom space,” says Aixtron’s VP of technology Johannes Kaeppeler. “The performance of the system met with our expectations right from the first run. Without a single calibration run, gallium nitride (GaN) films made using the central delivery system could not be distinguished from the films made using the conventional onboard delivery method,” he adds.

“Delivery to multiple reactors using large-scale cylinders with 20kg or more of content eliminates a number of costly inefficiencies, such as calibration runs, cylinder change outs, and residual ‘heels’ associated with on-board cylinders,” says Joe Reiser, general manager for Rohm and Haas Electronic Materials' Metalorganics business. “Additionally, the VaporStation central delivery system significantly increases reactor up time,” he reckons.

The VaporStation debuted in 2004, and recent installations at LED and solar cell manufacturers have proven its production worthiness, the firm says. The system can deliver a stable MO precursor concentration at a precisely controlled flow rate to up to 10 MOCVD reactors from a single 20kg supply cylinder. The delivery system has shown improved performance and economy over the traditional on-board MO source approach (in which each MOCVD reactor requires its own cylinder), it is claimed.

See related item:

Rohm and Haas launches enhanced version of MO precursor central delivery system

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