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Aixtron AG of Herzogenrath, Germany says that in fourth-quarter 2008 the Fraunhofer Institute for Solar Energy Systems (ISE) in Freiburg, Germany ordered an AIX 2800G4-R MOCVD Planetary Reactor in 8x6-inch configuration (with automated wafer handler) for delivery in fourth-quarter 2009.
Funded by the BMBF and the Fraunhofer Society, the new system will form the centerpiece of a program to develop and produce next-generation triple- and multi-junction solar cells in cooperation with industrial partners.
“We selected an Aixtron MOCVD system because of its high degree of flexibility and reproducibility that is achieved with the Planetary Reactor technology,” says Dr Frank Dimroth, head of Fraunhofer ISE’s III-V Epitaxy and Solar Cells group. “Moreover, we can employ the system's wide process window for tuning our new process technology... The AIX 2800G4-R will incorporate advanced in-situ monitoring technologies and we will be able to change wafer configurations flexibly up to 8.5 inch,” he adds. “I was impressed by the improvements which have been made in the reactor design compared to our current AIX 2600G3 system. The new Aixtron technology allows us to transfer our R&D processes up to high-volume mass-production, which is a prime target for our development project.”
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