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Deposition equipment maker Aixtron AG of Herzogenrath, Germany says that in Q3/2009 it received an order for a Close Coupled Showerhead CRIUS MOCVD system in 7x4 inch wafer configuration from SemiLEDs. The system will be delivered and installed at SemiLEDs’ 4-inch LED chip line in Taiwan in Q4/2009.
Dr Chuong Tran, president and COO of SemiLEDs, said, "We have chosen the Aixtron CRIUS system equipped with the Dynamic Reactor Height Adjustment feature, which facilitates growth at elevated pressures, providing an advantage for our proprietary MVP structure.”
Dr Christian Geng, VP Greater China of Aixtron, added, “We are looking forward to this 4-inch project as it is the first Close Coupled Showerhead Reactor to complement the existing manufacturing line of Planetary Reactor systems at SemiLEDs.”See related items:
SemiLEDs plans China LED wafer and chip fab
SemiLEDs adds capacity to meet demand for high-end lighting applications
Search: Aixtron SemiLEDs CCS CRIUS MOCVD LEDs
Visit: www.aixtron.com