News

8 April 2009

 

STS receives multi-tool order from Turkey’s new Institute of Materials Science and Nanotechnology

Plasma etch and deposition equipment supplier Surface Technology Systems plc (STS) of Newport, Wales, UK has sold two ICP systems to UNAM, a new Institute of Materials Science and Nanotechnology, based at Bilkent University in Turkey. The Inductively Coupled Plasma (ICP) etch tools will be used for a wide range of applications including deep reactive ion etching (DRIE) of silicon, plus dielectric, compound semiconductor and metal etching.

UNAM has been formed as Turkey's first national centre of excellence to lead nano/micro technology research, and will provide facilities for users from all universities and research centres in the country.

“We selected STS tools for our institute because not only are STS acknowledged market-leaders in DRIE of silicon, but their equipment offers very flexible processing capabilities for other materials that our researchers will be working with,” says assistant professor Mehmet Bayindir (assistant director of UNAM).

“We are very happy to have placed STS tools in this national centre, giving users from all over Turkey exposure to our technologies and equipment,” adds STS’ CEO Eizo Yasui. “We are looking forward to working with UNAM, as they establish themselves in the international nanotechnology research arena.”

See related item:

MiPlaza adds STS CPX cluster tool to range of technologies

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Visit: www.stsystems.com

Visit: www.nano.org.tr