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Mitsubishi Electric Corp (MELCO) in Japan has begun operation with a new AIX 2600G3 HT MOCVD reactor from Aixtron AG of Aachen in Germany, installed and commissioned in 11x2-inch wafer configuration for the development and volume production of GaN-based blue-violet lasers for use in high-density optical storage and related applications.
“Our previous experience with our existing Aixtron G3 MOCVD tools has confirmed the high quality of the engineering, service and process technology,” says MELCO. “Those systems have performed very well for the manufacture of AlGaInP-based high-power red lasers.”
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